With respect to the final pressure different pumps are available (see also page 48): Single-step rotary piston pump for a max. final pressure of approx. 20 mbar. Two-step rotary piston pump for a max. final pressure of approx. 10-2 mbar. Pump system PT70 Dry (rotary vane pump with following turbomolecular pump for a max. final pressure of 10-5 mbar. Information: For...
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